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Vertical CVD Furnace(Silicon Carbide)

Vertical CVD Furnace(Silicon Carbide)
Vertical CVD Furnace(Silicon Carbide)
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Product Code : 04
Brand Name : ACME
Price And Quantity
  • Minimum Order Quantity
  • 1
  • Unit of Measure
  • Set/Sets
  • Price Range
  • 140000.00 - 740000.00 USD ($)
Product Specifications
  • Condition
  • New
  • Usage
  • Heat Treatment furnace
  • Power
  • 220 Watt (w)
Product Description

Description

Vertical CVD tube‚ furnace (Silicon Carbide) adopts methyltrichlorosilane (MTS) as air source to make material surface oxidation resistant coating and change characters of matrix material.

Technical Features

  • The most advance control technology is adopted to control flow and pressure of MTS, realizing stable deposition airflow and small pressure fluctuation range.
  • Vacuum chemical vapor deposition furnace uses special designed deposition chamber, which assures good sealing effect and great contamination protection performance. 
  • Multiple deposition channels assure flow field uniformity, non-deposition dead corner and great deposition surface.
  • It has treatment for the high corrosive tail gas, flammable and explosive gas, solid dust and low melting point sticky materials during the deposition process.
  • The new design anti corrosion vacuum unit ensures long continuous working hours and short maintainence time.


Optional Configuration of Vertical CVD‚Tube‚Furnace

  • Furnace door: screw elevation type/hydraulic elevation type/manual elevation, Manual tight/Auto lock-ring tight
  • Furnace vessel: All carbon steel/Inner layer stainless steel/Total stainless steel
  • Furnace hot zone: Soft carbon felt/Soft graphite felt/Hard composite felt /CFC
  • Heating element and muffle: Isostatic press graphite/Press high purity, high strength and high density graphite/ fine size graphite
  • Process gas system: Volume/Mass flow-meter, Manual valve/Auto valve, Foreign brand/Chinese brand
  • Vacuum pump and gauge: Foreign brand/Chinese brand
  • HMI: Simulation screen/Touch screen/Industrial personal computer
  • PLC: OMRON/Siemens
  • Temperature controller: SHIMADEN/EUROTHERM
  • Thermocouple: C type, S type, K type, N type
  • Recorder: Paperless recorder/paper recorder, Foreign brand/Chinese brand
  • Electric components: CHINT/Schneider/Siemens


Specifications of Vertical CVD‚Tube‚ Furnace

Spec.\Model

VCVD-0305-SIC

VCVD-0608- SIC

VCVD-0812- SIC

VCVD-1015- SIC

VCVD-1120- SIC

VCVD-1520- SIC

Working Zone Size (D × H) (mm)

Φ300 × 500

Φ600 × 800

Φ800 × 1200

Φ1000 × 1500

Φ1100 × 2000

Φ1500 × 2000

Max. Temperature (°C)

1500

1500

1500

1500

1500

1500

Temperature Uniformity (°C)

±5

±5

±7.5

±7.5

±10

±10

Ultimate Vacuum (Pa)

50

50

50

50

50

50

Pressure Increase Rate (Pa/h)

0.67

0.67

0.67

0.67

0.67

0.67

The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.

Trade Information
  • FOB Port
  • Any port in China
  • Supply Ability
  • 10 Per Year
  • Delivery Time
  • 180 Days
  • Sample Policy
  • Contact us for information regarding our sample policy
  • Packaging Details
  • Packed in standard wooden box
  • Main Export Market(s)
  • Africa, Middle East, Western Europe, Eastern Europe, South America, North America, Central America, Australia, Asia
  • Main Domestic Market
  • All India
  • Certifications
  • ISO 9001, ISO14001 & IHSA 18000

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