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Vertical CVD Furnace(Silicon Carbide)

Vertical CVD Furnace(Silicon Carbide)
Vertical CVD Furnace(Silicon Carbide)
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Product Code : 04
Brand Name : ACME
Price And Quantity
  • Minimum Order Quantity
  • 1
  • Unit of Measure
  • Set/Sets
  • Price Range
  • 140000.00 - 740000.00 USD ($)
  • Price
Product Specifications
  • Condition
  • New
  • Usage
  • Heat Treatment furnace
  • Power
  • 220 Watt/Volt ( w/v)
Product Description

Description

Vertical CVD tube‚ furnace (Silicon Carbide) adopts methyltrichlorosilane (MTS) as air source to make material surface oxidation resistant coating and change characters of matrix material.

Technical Features

  • The most advance control technology is adopted to control flow and pressure of MTS, realizing stable deposition airflow and small pressure fluctuation range.
  • Vacuum chemical vapor deposition furnace uses special designed deposition chamber, which assures good sealing effect and great contamination protection performance. 
  • Multiple deposition channels assure flow field uniformity, non-deposition dead corner and great deposition surface.
  • It has treatment for the high corrosive tail gas, flammable and explosive gas, solid dust and low melting point sticky materials during the deposition process.
  • The new design anti corrosion vacuum unit ensures long continuous working hours and short maintainence time.


Optional Configuration of Vertical CVD‚Tube‚Furnace

  • Furnace door: screw elevation type/hydraulic elevation type/manual elevation, Manual tight/Auto lock-ring tight
  • Furnace vessel: All carbon steel/Inner layer stainless steel/Total stainless steel
  • Furnace hot zone: Soft carbon felt/Soft graphite felt/Hard composite felt /CFC
  • Heating element and muffle: Isostatic press graphite/Press high purity, high strength and high density graphite/ fine size graphite
  • Process gas system: Volume/Mass flow-meter, Manual valve/Auto valve, Foreign brand/Chinese brand
  • Vacuum pump and gauge: Foreign brand/Chinese brand
  • HMI: Simulation screen/Touch screen/Industrial personal computer
  • PLC: OMRON/Siemens
  • Temperature controller: SHIMADEN/EUROTHERM
  • Thermocouple: C type, S type, K type, N type
  • Recorder: Paperless recorder/paper recorder, Foreign brand/Chinese brand
  • Electric components: CHINT/Schneider/Siemens


Specifications of Vertical CVD‚Tube‚ Furnace

Spec.\Model

VCVD-0305-SIC

VCVD-0608- SIC

VCVD-0812- SIC

VCVD-1015- SIC

VCVD-1120- SIC

VCVD-1520- SIC

Working Zone Size (D × H) (mm)

Φ300 × 500

Φ600 × 800

Φ800 × 1200

Φ1000 × 1500

Φ1100 × 2000

Φ1500 × 2000

Max. Temperature (°C)

1500

1500

1500

1500

1500

1500

Temperature Uniformity (°C)

±5

±5

±7.5

±7.5

±10

±10

Ultimate Vacuum (Pa)

50

50

50

50

50

50

Pressure Increase Rate (Pa/h)

0.67

0.67

0.67

0.67

0.67

0.67

The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.

Trade Information
  • FOB Port
  • Any port in China
  • Payment Terms
  • Western Union, Telegraphic Transfer (T/T), Letter of Credit at Sight (Sight L/C), Letter of Credit (L/C)
  • Supply Ability
  • 10 Per Year
  • Delivery Time
  • 180 Days
  • Sample Policy
  • Contact us for information regarding our sample policy
  • Packaging Details
  • Packed in standard wooden box
  • Main Export Market(s)
  • Africa, Middle East, Western Europe, Eastern Europe, South America, North America, Central America, Australia, Asia
  • Main Domestic Market
  • All India
  • Certifications
  • ISO 9001, ISO14001 & IHSA 18000

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