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Horizontal CVD Furnace(Silicon Carbide)

Horizontal CVD Furnace(Silicon Carbide)
Horizontal CVD Furnace(Silicon Carbide)
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Product Code : 03
Price And Quantity
  • Minimum Order Quantity
  • 1
  • Unit of Measure
  • Set/Sets
  • Price Range
  • 140000.00 - 740000.00 USD ($)
Product Specifications
  • Condition
  • New
  • Usage
  • Heat Treatment furnace
  • Power
  • 220 Watt (w)
Product Description

Description

Horizontal CVD tube furnace (Silicon Carbide) uses methyltrichlorosilane (MTS) as air source to make material surface oxidation resistant coating and change characters of matrix material.

Technical Features

  • High corrosive tail gas, combustible and explosion gas, solid dust and low melting point product can be treated effectively during deposition process.
  • Horizontal chemical vapor deposition furnace uses special designed deposition chamber, which assures good sealing effect and strong antipollution ability. 
  • The most advance control technology is adopted to precise control the MTS flow and pressure , realizing stable deposition airflow and narrow pressure fluctuation range.
  • The new design anti corrosion vacuum unit ensures long continuous working period and low maintainence rate.
  • Multiple deposition channels achieve flow field uniformity, non-deposition dead corner and better deposition effect.
  • The furnace working zone size can reach 2.5m x 2.5m x 5m,it can satisfy supersize part CVD treatment. 


Optional Configuration of Horizontal CVD Furnace

  • Furnace door: Hing turning type/ trolley type, Manual tight/Auto lock-ring tight
  • Furnace vessel: All carbon steel/Inner layer stainless steel/Total stainless steel
  • Furnace hot zone: Soft carbon felt/Soft graphite felt/Hard composite felt /CFC
  • Heating element and muffle: Isostatic press graphite/Press high purity, high strength and high density graphite/ fine size graphite
  • Process gas system: Volume/Mass flow-meter, Manual valve/Auto valve, Foreign brand/Chinese brand
  • Vacuum pump and gauge: Foreign brand/Chinese brand
  • HMI: Simulation screen/Touch screen/Industrial personal computer
  • PLC: OMRON/Siemens
  • Temperature controller: SHIMADEN/EUROTHERM
  • Thermocouple: C type, S type, K type, N type
  • Recorder: Paperless recorder/paper recorder, Foreign brand/Chinese brand
  • Electric components: CHINT/Schneider/Siemens
  • Load truck: roller type /Fork type/Folded long distance driving type


Specifications of Horizontal CVD Tube Furnace

Spec.\Model

HCVD-060609-SIC

HCVD-080812-SIC

HCVD-101015-SIC

HCVD-121225-SIC

HCVD-151530-SIC

Working Zone Size (W × H × L) (mm)

Φ600 × 600 × 900

Φ800 × 800 × 1200

Φ1000 × 1000 × 1500

Φ1200 × 200 × 2500

Φ1500 × 500 × 3000

Max. Temperature (°C)

1500

1500

1500

1500

1500

Temperature Uniformity (°C)

±7.5

±7.5

±7.5

±10

±10

Ultimate Vacuum (Pa)

50

50

50

50

50

Pressure Increase Rate (Pa/h)

0.67

0.67

0.67

0.67

0.67

The above specifications can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.

Trade Information
  • FOB Port
  • Any port in China
  • Payment Terms
  • Western Union, Telegraphic Transfer (T/T), Letter of Credit at Sight (Sight L/C), Letter of Credit (L/C)
  • Supply Ability
  • 10 Per Year
  • Delivery Time
  • 180 Days
  • Sample Policy
  • Contact us for information regarding our sample policy
  • Packaging Details
  • Packed in standard wooden box
  • Main Export Market(s)
  • Africa, Middle East, Western Europe, Eastern Europe, South America, North America, Central America, Australia, Asia
  • Main Domestic Market
  • All India
  • Certifications
  • ISO 9001, ISO14001 & IHSA 18000

Advanced Corporation For Materials & Equipments
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